Books by G. S. Oehrlein

Cover of Advanced etch technology for nanopatterning

Advanced etch technology for nanopatterning

by Ying Zhang, G. S. Oehrlein, Qinghuang Lin

2012
Cover of Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics

Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics

by G. S. Oehrlein, K. Maex, S. Ogawa, J. T. Wetzel, Y. -C Joo

2014

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